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Other. 2010 Dhobi Ghat (2011) Hindi Bluray 720p.Bluray. 1.37 GB. 1280*534. English. Not Rated1. Field of the Invention
The present invention relates to a semiconductor device and a method of fabricating the semiconductor device, and more particularly to a semiconductor device of a trench type and a method of fabricating the semiconductor device.
2. Description of the Related Art
A vertical power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) has been known as an example of a high breakdown voltage semiconductor device. The vertical power MOSFET has a bottom p-type semiconductor layer containing a source layer of low impurity density, as disclosed in, for example, U.S. Pat. No. 6,034,510.
Japanese Unexamined Patent Application Publication No. 2002-001318 discloses a technology of bringing an electrode into contact with a semiconductor epitaxial layer of a depletion layer type semiconductor device.
In a vertical power MOSFET as disclosed in U.S. Pat. No. 6,034,510, the bottom p-type semiconductor layer containing the source layer of low impurity density is formed in a rectangular shape. Because a collector layer is formed in a rectangular shape by epitaxial growth, the ratio of a distance between the bottom p-type semiconductor layer and the collector layer, that is, the ratio of a depth of a trench, is reduced.
In this case, a gate length of the vertical power MOSFET is reduced, and 0b46394aab